Publication:

Predictive compact model for stress-induced on-product overlay correction

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.4.043201
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Published version 5.89 MB

Author(s)

Zhang, Huaichen
;
Tabery, Cyrus
;
Maas, Ruben
;
Khodko, Oleksandr
;
Blanco, Victor  
;
Canga, Eren  
;
Schleicher, Filip  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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1454 since deposited on 2023-03-01
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37 since deposited on 2023-03-01
Acq. date: 2025-10-23

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1454 since deposited on 2023-03-01
Acq. date: 2025-10-23

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