Publication:

Predictive compact model for stress-induced on-product overlay correction

Date

2022
Journal article
https://doi.org/10.1117/1.jmm.21.4.043201
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Author(s)

Zhang, Huaichen
;
Tabery, Cyrus
;
Maas, Ruben
;
Khodko, Oleksandr
;
Blanco, Victor  
;
Canga, Eren  
;
Schleicher, Filip  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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193 since deposited on 2023-03-01
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Acq. date: 2026-08-09

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