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Browsing by Author "Khomyakov, Petr A."

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    Publication

    Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers

    Shah, Asif A.
    ;
    Delie, Gilles  
    ;
    Khomyakov, Petr A.
    ;
    Wellendorff, Jess
    ;
    Richard, Olivier  
    Journal article
    2026, ACS APPLIED MATERIALS & INTERFACES, (18) 14, p.20763-20776

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