Publication:

Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers

Date

2026

Journal article

https://doi.org/10.1021/acsami.6c03315

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Author(s)

;

;

Khomyakov, Petr A.

;

Wellendorff, Jess

;

Richard, Olivier

;

;

Shrivastava, Mayank

;

;

Zahedmanesh, Houman

Journal

ACS APPLIED MATERIALS & INTERFACES

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Acq. date: 2026-08-28