Publication:
Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-1058-9424 | |
| cris.virtual.orcid | 0000-0002-3994-8021 | |
| cris.virtual.orcid | 0000-0002-0290-691X | |
| cris.virtual.orcid | 0000-0002-5646-3261 | |
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| cris.virtualsource.department | 1d3a5ef4-62d3-4a57-869c-861f2c258457 | |
| cris.virtualsource.orcid | d41bbdfd-20df-46cf-9106-e8e19a469a8d | |
| cris.virtualsource.orcid | df8401d6-bf8a-4030-b504-322d3c8b038d | |
| cris.virtualsource.orcid | 60497238-bd25-43d2-a0aa-de0269427c92 | |
| cris.virtualsource.orcid | 1d3a5ef4-62d3-4a57-869c-861f2c258457 | |
| dc.contributor.author | Shah, Asif A. | |
| dc.contributor.author | Delie, Gilles | |
| dc.contributor.author | Khomyakov, Petr A. | |
| dc.contributor.author | Wellendorff, Jess | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Park, Seongho | |
| dc.contributor.author | Shrivastava, Mayank | |
| dc.contributor.author | Ceric, Hajdin | |
| dc.contributor.author | Zahedmanesh, Houman | |
| dc.contributor.orcidext | 0009-0005-4372-5428 | |
| dc.contributor.orcidext | 0000-0003-1005-040X | |
| dc.contributor.orcidext | 0000-0002-0290-691X | |
| dc.date.accessioned | 2026-07-27T13:46:13Z | |
| dc.date.available | 2026-07-27T13:46:13Z | |
| dc.date.createdwos | 2026 | |
| dc.date.issued | 2026 | |
| dc.description.wosFundingText | The authors would like to acknowledge Geoffrey Pourtois, Christoph Adelmann, Zsolt Tokei, Ivan Ciofi (AR2T), and Dimitri Linten (AR2T) at Imec, Belgium and Julian Schneider from Synopsys Denmark for helpful inputs and discussions during the course of this project. The author A.A.S. would also like to thank Imec, Belgium for a research fellowship and the Govt. of India for a PMRF fellowship. | |
| dc.identifier.doi | 10.1021/acsami.6c03315 | |
| dc.identifier.eissn | 1944-8252 | |
| dc.identifier.issn | 1944-8244 | |
| dc.identifier.issn | 1944-8252 | |
| dc.identifier.pmid | MEDLINE:41914472 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/59995 | |
| dc.language.iso | eng | |
| dc.provenance.editstepuser | greet.vanhoof@imec.be | |
| dc.publisher | AMER CHEMICAL SOC | |
| dc.relation.ispartofseries | ACS Applied Materials & Interfaces | |
| dc.source.beginpage | 20763 | |
| dc.source.endpage | 20776 | |
| dc.source.issue | 14 | |
| dc.source.journal | ACS APPLIED MATERIALS & INTERFACES | |
| dc.source.numberofpages | 14 | |
| dc.source.volume | 18 | |
| dc.subject.keywords | FUTURE COPPER INTERCONNECTS | |
| dc.subject.keywords | SELF-DIFFUSION | |
| dc.subject.keywords | OXYGEN | |
| dc.subject.keywords | TECHNOLOGY | |
| dc.subject.keywords | RESISTANCE | |
| dc.subject.keywords | INSIGHTS | |
| dc.subject.keywords | RU(0001) | |
| dc.subject.keywords | METALS | |
| dc.subject.keywords | CO | |
| dc.subject.keywords | CU | |
| dc.title | Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2026-04-07 | |
| imec.internal.source | crawler | |
| imec.internal.wosCreatedAt | 2026-07-14 | |
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