Browsing by Author "Kikuchi, Y."

Now showing 1 - 3 of 3

A Novel Volatile Film for Dielectric Plasma Damage Protection

de Marneffe, Jean-Francois
;
Rezvanov, Askar
;
Chanson, Romain
;
Babaei Gavan, Khashayar
Meeting abstract
2019, Plasma Etch and Strip in Microtechnology Workshop - PESM, 20/05/2019
Novel volatile film for the protection of organo-silicate glass dielectric materials

Fujikawa, Makoto
;
Yamaguchi, Tatsuya
;
Nozawa, S.
;
Kikuchi, Y.
;
Maekawa, Kaoru
;
Kawasaki, H.
Journal article
2019, IEEE Transactions on Semiconductor Manufacturing, (32) 4, p.438-443
Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics

de Marneffe, Jean-Francois
;
Yamaguchi, Tatsuya
;
Fujikawa, Makoto
;
Rezvanov, Askar
Journal article
2019, ACS Applied Electronic Materials, (1) 12, p.2602-2611