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Browsing by Author "Kim, Chul Sung"

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    Carbon-based thermal stabilization techniques for junction and silicide engineering for high performance CMOS periphery in memory applications

    Ortolland, Claude
    ;
    Mathew, Suraj
    ;
    Duffy, Ray
    ;
    Saino, Kanta
    ;
    Kim, Chul Sung
    ;
    Mertens, Sofie  
    Proceedings paper
    2009, 10th International Conference on Ultimate Integration of Silicon - ULIS, 18/03/2009, p.147-150
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    First electrical demonstration of DRAM compatible Ni silicides

    Machkaoutsan, Vladimir  
    ;
    Bauer, Matthias
    ;
    Zhang, Y.
    ;
    Koelling, Sebastian
    ;
    Franquet, Alexis  
    Oral presentation
    2009, 18th Workshop Materials for Advanced Metallization - MAM

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