First electrical demonstration of DRAM compatible Ni silicides

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Author(s)

Machkaoutsan, Vladimir

;

Bauer, Matthias

;

;

Koelling, Sebastian

;

Franquet, Alexis

;

Vanormelingen, Koen

;

Verheyen, Peter

;

;

;

;

Hoffmann, Thomas Y.

;

Absil, Philippe

;

Granneman, Ernst

;

Vandervorst, Wilfried

;

Thomas, Shawn. G

Metrics

2003 since deposited on 2021-10-18

Acq. date: 2025-12-09