Browsing by Author "Kim, Eunji"
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Publication Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
Journal article2008, Journal of the Electrochemical Society, (155) 12, p.H937-H944Publication Impact of precursors in the atomic layer deposition of high-k dielectrics on semiconductor substrates
Meeting abstract2008, China Semiconductor Material International Conference - CSMIC, 19/03/2008, p.139-141