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Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
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1987 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-08
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Metrics
Views
1987 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-08
Citations