Request a copy of the file
Enter the following information to request a copy for the following item: Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
Requesting the following file: 16722.pdf
Enter the following information to request a copy for the following item: Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
Requesting the following file: 16722.pdf