Publication:
Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1995 since deposited on 2021-10-17
3last month
1last week
Acq. date: 2026-08-11
Citations
Statistics
Views
1995 since deposited on 2021-10-17
3last month
1last week
Acq. date: 2026-08-11
Citations