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Browsing by Author "Kim, Hongun"

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    Dielectric reliability of 50nm 1/2 pitch structures in Aurora® LK

    Demuynck, Steven  
    ;
    Kim, Hongun
    ;
    Huffman, Craig
    ;
    Darnon, Maxime
    ;
    Struyf, Herbert  
    ;
    Versluijs, Janko  
    Proceedings paper
    2008, 40th International Confernece on Solid STate Devices and Materials, 22/09/2008

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