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Browsing by Author "Kim, Hyun-Woo"

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    Effect of water on resist performance beyond resolution enhancement in 193nm immersion lithography

    Kim, Hyun-Woo
    ;
    Delvaux, Christie  
    ;
    Baerts, Christina  
    ;
    Gronheid, Roel  
    ;
    Foubert, Philippe  
    Proceedings paper
    2005, 2nd International Symposium on Immersion Lithography, 12/09/2005

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