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Browsing by Author "Kim, J. S."

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    Novel patterning shrink technique enabling sub-50nm trench and contact integration

    Demuynck, Steven  
    ;
    Tokei, Zsolt  
    ;
    Zhao, Chao
    ;
    de Marneffe, Jean-Francois  
    ;
    Struyf, Herbert  
    Proceedings paper
    2007, International Symposium on Semiconductor Manufacturing, 15/10/2007

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