Browsing by Author "Kim, Ji Soo"
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Publication 30-nm half-pitch metal patterning using MotifTM critical dimension shrink technique and double patterning
Journal article2009, Journal of Micro/Nanolithography MEMS MOEMS, (8) 1, p.11007Publication 30nm half-pitch metal patterning using MotifTM CD shrink technique and double patterning
Proceedings paper2008, Optical Microlithography XXI, 24/02/2008, p.69242C