Browsing by Author "Kim, JiHoon"
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Publication Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Journal article2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31204Publication Impact of BCP asymmetry on DSA patterning performance
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.943215