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Browsing by Author "Kim, YiHoon"

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    Publication

    Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow

    Pathangi Sriraman, Hari
    ;
    Chan, BT  
    ;
    Bayana, Hareen  
    ;
    Van Den Heuvel, Dieter  
    ;
    Van Look, Lieve  
    Proceedings paper
    2015, Alternative Lithographic Technologies VII, 22/02/2015, p.94230M

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