Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "King, S."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Influence of porosity on VUV induced damage to low-k dielectrics

    Choudhury, F.
    ;
    de Marneffe, Jean-Francois  
    ;
    Baklanov, Mikhaïl
    ;
    King, S.
    ;
    Nishi, Y.
    ;
    Shohet, J.
    Meeting abstract
    2015, AVD 62nd International Symposium & Exhibition, 18/10/2015

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings