Browsing by Author "Kirkwood, D."
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Publication Characterization of low energy (2-5keV) implantation into Si
Oral presentation2002, Ion Implantation ConferencePublication Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation
Proceedings paper2005, USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005Publication Ultra-shallow junction process development for the 45nm CMOS technology node using co-implantation
Oral presentation2004, 15th International Conference on Ion Implantation Technology