Browsing by Author "Kirsch, H."

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Application of a new approach to optical proximity correction

Rosenbusch, A.
;
Hourd, A.
;
Juffermans, Casper
;
Kirsch, H.
;
Lalanne, F.
;
Maurer, W.
;
Romeo, C.
Proceedings paper
1999, Optical Microlithography XII, 17/03/1999, p.639-647
New approach to optical proximity correction

Rosenbusch, A.
;
Hourd, A.
;
Juffermans, C.
;
Kirsch, H.
;
Lalanne, F.
;
Maurer, W.
;
Romeo, C.
;
Ronse, Kurt
Proceedings paper
1998, 18th Annual Bacus Symposium on Photomask Technology and Management, 16/09/1998, p.585-593