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Application of a new approach to optical proximity correction
Publication:
Application of a new approach to optical proximity correction
Date
1999
Proceedings Paper
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3749.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rosenbusch, A.
;
Hourd, A.
;
Juffermans, Casper
;
Kirsch, H.
;
Lalanne, F.
;
Maurer, W.
;
Romeo, C.
;
Ronse, Kurt
;
Schiavone, P.
;
Simecek, M.
;
Toublan, O.
;
Vermeulen, Tom
;
Watson, J.
;
Ziegler, W.
;
Zimmerman, R.
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2078
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2078
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations