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Browsing by Author "Kittl, Jorge Adrian"

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    Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

    Popovici, Mihaela Ioana  
    ;
    Van Elshocht, Sven  
    ;
    Menou, Nicolas
    ;
    Swerts, Johan  
    ;
    Pierreux, Dieter  
    Proceedings paper
    2009, CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications, 13/04/2009, p.1155-C08-03

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