Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

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Author(s)

Popovici, Mihaela Ioana

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Van Elshocht, Sven

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;

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Pierreux, Dieter

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Delabie, Annelies

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;

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Faelens, Gerrit

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Franquet, Alexis

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Conard, Thierry

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Maes, Jan Willem

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;

Kittl, Jorge Adrian

Metrics

2015 since deposited on 2021-10-18

Acq. date: 2025-10-23