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Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4
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2019 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-08
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Views
2019 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-08
Citations