Publication:

Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

Date

2009
Proceedings Paper
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dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorMenou, Nicolas
dc.contributor.authorSwerts, Johan
dc.contributor.authorPierreux, Dieter
dc.contributor.authorDelabie, Annelies
dc.contributor.authorOpsomer, Karl
dc.contributor.authorBrijs, Bert
dc.contributor.authorFaelens, Gerrit
dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorMaes, Jan Willem
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge Adrian
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.date.accessioned2021-10-18T01:51:51Z
dc.date.available2021-10-18T01:51:51Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16044
dc.identifier.urlhttp://www.mrs.org/s_mrs/bin.asp?CID=18435&DID=250629&DOC=FILE.PDF
dc.source.beginpage1155-C08-03
dc.source.conferenceCMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

dc.typeProceedings paper
dspace.entity.typePublication
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