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Browsing by Author "Klein, E."

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    Publication

    Reducing optical losses in focused-ion-beam etched silicon

    Schrauwen, Jonathan
    ;
    Van Thourhout, Dries  
    ;
    Baets, Roel  
    ;
    Klein, E.
    ;
    Ay, F.
    ;
    Hopman, W.
    ;
    De Ridder, R.
    Oral presentation
    2008, 52nd International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication - EIPBN

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