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Browsing by Author "Kleindiek, Stephan"

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    Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

    Arstila, Kai
    ;
    Hantschel, Thomas  
    ;
    Kleindiek, Stephan
    ;
    Sterr, Jochen
    ;
    Vaquette, Quentin
    Meeting abstract
    2009, 35th International Conference on Micro & Nano Engineering - MNE, 28/09/2009
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    Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

    Arstila, Kai
    ;
    Hantschel, Thomas  
    ;
    Kleindiek, Stephan
    ;
    Sterr, Jochen
    ;
    Vaquette, Quentin
    Journal article
    2010, Microelectronic Engineering, (87) 5_8, p.1410-1412
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    Towards the understanding of resistive contrast imaging in in situ dielectric breakdown studies using a nanoprober setup

    Lambrinou, Konstantza
    ;
    Hantschel, Thomas  
    ;
    Arstila, Kai
    ;
    Kleindiek, Stephan
    ;
    Rummel, Andreas
    Proceedings paper
    2010, Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics, 5/04/2010, p.1249-F08-14

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