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Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
Publication:
Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
Date
2010
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Arstila, Kai
;
Hantschel, Thomas
;
Kleindiek, Stephan
;
Sterr, Jochen
;
Vaquette, Quentin
;
Demeulemeester, Cindy
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
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1862
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Acq. date: 2025-10-29
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Metrics
Views
1862
since deposited on 2021-10-18
3
last week
Acq. date: 2025-10-29
Citations