Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

dc.contributor.author	Arstila, Kai
dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Kleindiek, Stephan
dc.contributor.author	Sterr, Jochen
dc.contributor.author	Vaquette, Quentin
dc.contributor.author	Demeulemeester, Cindy
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-18T15:16:25Z
dc.date.available	2021-10-18T15:16:25Z
dc.date.embargo	9999-12-31
dc.date.issued	2010
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16673
dc.source.beginpage	1410
dc.source.endpage	1412
dc.source.issue	5_8
dc.source.journal	Microelectronic Engineering
dc.source.volume	87
dc.title	Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
dc.type	Journal article
dspace.entity.type	Publication
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