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Browsing by Author "Klimin, S."

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    Publication

    Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

    Zotovich, Alexey
    ;
    Rezvanov, Askar
    ;
    Chanson, Romain
    ;
    Zhang, L.
    ;
    Hacker, N.
    ;
    Kurchikov, K.
    Journal article
    2018, Journal of Physics D: Applied Physics, (51) 32, p.325202

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