Browsing by Author "Klimin, S."
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Publication Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach
;Zotovich, Alexey ;Rezvanov, Askar ;Chanson, Romain ;Zhang, L. ;Hacker, N.Kurchikov, K.Journal article2018, Journal of Physics D: Applied Physics, (51) 32, p.325202