Browsing by Author "Klippert, W."
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Publication Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processes
Journal article1998, Journal of Vacuum Science and Technology B, (12) 6, p.3322-3333Publication Integrated silylation and dry development of resist for sub-0.15µm top surface imaging applications
Journal article1998, J. Photopolymer Science and Technology, (11) 4, p.597-612