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Browsing by Author "Klostermann, U."

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    Calibration of physical resist models: methods, usability, and predictive power

    Klostermann, U.
    ;
    Mülders, T.
    ;
    Ponomarenco, D.
    ;
    Schmöller, T.
    ;
    Van de Kerkhove, Jeroen  
    Journal article
    2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 3, p.33005

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