Publication:

Calibration of physical resist models: methods, usability, and predictive power

Date

2009
Journal article
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Author(s)

Klostermann, U.
;
Mülders, T.
;
Ponomarenco, D.
;
Schmöller, T.
;
Van de Kerkhove, Jeroen  
;
De Bisschop, Peter  

Journal

Journal of Micro/Nanolithography, MEMS, and MOEMS

Abstract

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1 since deposited on 2021-10-17
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1983 since deposited on 2021-10-17
Acq. date: 2026-08-29

Citations