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Articles
Calibration of physical resist models: methods, usability, and predictive power
Publication:
Calibration of physical resist models: methods, usability, and predictive power
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Klostermann, U.
;
Mülders, T.
;
Ponomarenco, D.
;
Schmöller, T.
;
Van de Kerkhove, Jeroen
;
De Bisschop, Peter
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
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1979
since deposited on 2021-10-17
Acq. date: 2025-12-11
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Downloads
1
since deposited on 2021-10-17
Acq. date: 2025-12-11
Views
1979
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations