Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Knechtel, R."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy

    van Spengen, Merlijn
    ;
    De Wolf, Ingrid  
    ;
    Knechtel, R.
    Proceedings paper
    2000, Materials and Device Characterization in Micromachining III, 17/09/2000, p.132-139

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings