Publication:
Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy
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1961 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-16
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Statistics
Views
1961 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-16
Citations