Publication:
Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Knechtel, R. | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-14T14:04:23Z | |
| dc.date.available | 2021-10-14T14:04:23Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4855 | |
| dc.source.beginpage | 132 | |
| dc.source.conference | Materials and Device Characterization in Micromachining III | |
| dc.source.conferencedate | 17/09/2000 | |
| dc.source.conferencelocation | Santa Clara, CA USA | |
| dc.source.endpage | 139 | |
| dc.title | Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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