Browsing by Author "Knoops, An"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures
Proceedings paper2010, Chemical Sensors 9 - and MEMS/NEMS 9, 10/10/2010, p.295-307Publication Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures
Meeting abstract2010, 218th ECS Meeting Symposium J3: Microfabricated and Nanofabricated Systems for MEMS/NEMS 9, 10/10/2010, p.2333