Browsing by Author "Kobayashi, Takashi"
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Publication Precise measurement of thin film thickness in 3D-NAND device with CD-SEM
;Ohashi, Takeyoshi ;Atsuko, Yamaguchi ;Kobayashi, Takashi ;Inoue, OsamuHasumi, KazuhisaOral presentation2016, 42nd Micro and Nano Engineering Conference