Browsing by Author "Kolbesen, B. O."
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Publication Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Meeting abstract2001, 200th Meeting of the Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device Manufac, 2/09/2001Publication Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination
Journal article1999, Microelectronic Engineering, (45) 2_3, p.197-208Publication Effect of metal contamination and improved cleaning strategies
Proceedings paper1999, Defects in Silicon III, 2/05/1999, p.401-413Publication Single chemistry cleaning solution for advanced wafer cleaning
Proceedings paper2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.119-122Publication Single step alkaline cleaning solution for advanced semiconductor cleaning
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Single step alkaline cleaning solution for advanced semiconductor cleaning
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.23-26