Browsing by Author "Komori, K."
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Publication Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatment
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.223-226Publication Selective wet etching in fabricating SiGe and Ge nanowires for gate-all-around MOSFETs
Proceedings paper2018, Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS, 3/09/2018, p.101-106