Publication:

Selective wet etching in fabricating SiGe and Ge nanowires for gate-all-around MOSFETs

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1863 since deposited on 2021-10-25
2last month
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Acq. date: 2026-08-10

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1863 since deposited on 2021-10-25
2last month
1last week
Acq. date: 2026-08-10

Citations