Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Koop, H."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Investigation of mask defectivity in full field EUV lithography

    Jonckheere, Rik  
    ;
    Iwamoto, Fumio
    ;
    Lorusso, Gian  
    ;
    Goethals, Mieke
    ;
    Ronse, Kurt  
    ;
    Koop, H.
    Proceedings paper
    2007, SPIE Photomask Technology (BACUS), 17/09/2007, p.673012

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings