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Browsing by Author "Kopalidis, Peter"

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    Characterization and residue elimination of hot aluminum etching in a transformer coupled plasma etcher

    Kopalidis, Peter
    ;
    Vertommen, Johan
    ;
    Badenes, Gonçal
    Journal article
    1996, Journal of Electrochemical Society, (143) 5, p.1763-1768

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