Browsing by Author "Kornelsen, Kevin"
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Publication Ultra-high density MEMS probe memory device
;Heck, John ;Adams, Donald ;Belov, Nicolai ;Chou, T-K.A. ;Kim, B. ;Kornelsen, Kevin ;Ma, Q.Rao, V.Journal article2010, Microelectronic Engineering, (87) 5_8, p.1198-1203