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Articles
Ultra-high density MEMS probe memory device
Publication:
Ultra-high density MEMS probe memory device
Date
2010
Journal article
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19591.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heck, John
;
Adams, Donald
;
Belov, Nicolai
;
Chou, T-K.A.
;
Kim, B.
;
Kornelsen, Kevin
;
Ma, Q.
;
Rao, V.
;
Severi, Simone
;
Spicer, Dean
;
Tchelepi, G.
;
Witvrouw, Ann
Journal
Microelectronic Engineering
Abstract
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1955
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-09
Citations
Metrics
Views
1955
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-09
Citations