Browsing by Author "Koudriavtsev, I"
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Publication Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films
Journal article2015, Thin Solid Films, 575, p.103-106Publication Study of porogen removal by HWCVD for the fabrication of advanced low-k films
Meeting abstract2012, 7th International Conference on Hot- Wire Chemical Vapor deposition - Cat-CVD, 8/10/2012, p.T5-7-T5-7