Browsing by Author "Kovacs, Fredi"
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Publication Etching and cleaning of HfO2 deposited on Si
Proceedings paper2002-11, The 1st International Surface Cleaning Workshop, 11/11/2002Publication Selective single-wafer wet etching of Hf-based layers
Journal article2005, Semiconductor Fabtech, 28, p.115-120Publication Selective wet etching of nickel
Proceedings paper2005-04, SEMATECH Wafer Clean & Surface Prep Conference, 18/04/2005