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Browsing by Author "Kragler, G."

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    Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy

    Kragler, G.
    ;
    Bender, Hugo  
    ;
    Willeke, Gerhard
    ;
    Bucher, E.
    ;
    Vanhellemont, Jan
    Journal article
    1994, Applied Physics A, 58, p.77-80

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