Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy
Publication:
Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy
Date
1994
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
212.pdf
297.32 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kragler, G.
;
Bender, Hugo
;
Willeke, Gerhard
;
Bucher, E.
;
Vanhellemont, Jan
Journal
Applied Physics A
Abstract
Description
Metrics
Views
2079
since deposited on 2021-09-29
Acq. date: 2025-10-22
Citations
Metrics
Views
2079
since deposited on 2021-09-29
Acq. date: 2025-10-22
Citations