Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy

dc.contributor.author	Kragler, G.
dc.contributor.author	Bender, Hugo
dc.contributor.author	Willeke, Gerhard
dc.contributor.author	Bucher, E.
dc.contributor.author	Vanhellemont, Jan
dc.contributor.imecauthor	Bender, Hugo
dc.date.accessioned	2021-09-29T12:42:48Z
dc.date.available	2021-09-29T12:42:48Z
dc.date.embargo	9999-12-31
dc.date.issued	1994
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/220
dc.source.beginpage	77
dc.source.endpage	80
dc.source.journal	Applied Physics A
dc.source.volume	58
dc.title	Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy
dc.type	Journal article
dspace.entity.type	Publication
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