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Browsing by Author "Kramer, M. C. J. C. M."

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    Chemical role of SF6 in a SiCl4-based reactive ion etching of GaN

    Karouta, F.
    ;
    Jacobs, B.
    ;
    Kramer, M. C. J. C. M.
    ;
    Jacobs, Koen
    ;
    Moerman, Ingrid  
    Oral presentation
    1999, Semiconductor and Integrated Optoelectronics - SIOE

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